・This is a small and lightweight handy type UV illuminance meter.
・In response to the demands of various UV application measurement applications, an auto range function is also provided so that UV illuminance and light intensity can be measured easily.
・RS-232C communication output is provided so that measurement data can be transferred to a PC for use.
・The receiver is set to UV-35 as standard. UV-25 and UV-42 can be measured by replacing the optional receiver. (The receiver is compatible with the conventional model UV-M02.)
・An analog output is provided for the recorder.
・In addition to dry batteries, AC power can also be used with the included AC adapter.
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|Illuminance / Light intensity||0.001～50mW/c㎡|
|Alignment accuracy||Within ± 1.5% of our UV standard|
|Repeat accuracy||Within ± 1.5%|
|Power supply||2 batteries or 100 to 240 VAC|
|option||UV-25, 42 sensor, ES-232C code|
Neutral density filter 1/10, 1/20, 1/50
|Recorder output||DC1000mV / full scale|
|Dimensions / weight||Body 71 (W) × 151 (D) × 29 (H) mm / 160g|
Receiver 35 (W) × 55 (D) × 18 (H) mm / 50g
The SD type has been widely used by customers who have been using exposure equipment and irradiation equipment for a long time, ensuring continuity of process management.
SD type is used in the manufacturing process of semiconductor and liquid crystal substrates, and customers who already use illuminance meters made by other companies place importance on ensuring data compatibility with those measuring instruments (projection type even in exposure equipment). SD type is used for exposure equipment and peripheral exposure equipment for liquid crystal substrates), and is recommended for customers who use illuminometers completely newly.
In order to ensure the compatibility of process data from the past with the SN type, the indication value of the SD type (the 365 nm emission line of the high-pressure mercury lamp used as the calibration radiation source in the measurement group was measured under the same measurement conditions. It is adjusted to display 39% higher than the illuminance value shown at the time: mW / cm2 display.